On The Scope – A Masterclass in Practical Scanning Electron Microscopy

Next Offering: May 2024
Course Description
On The Scope – A Masterclass in Practical Scanning Electron Microscopy is a training program covering the fundamentals of scanning electron microscopy (SEM) operation. The program is provided by The Ohio State University Center for Electron Microscopy and Analysis (CEMAS), a unique facility containing more than $40 million in electron microscopes, expert technical staff, and a state-of-the-art digital theater. The program consists of two components:
- Component #1: A series of lectures/demonstration sessions delivered 100% live, online or in-person over three days.
- Component #2: A two day, “hands-on” training workshop on the electron microscopes. These training events are delivered in a safe, socially distant manner to small groups. The workshops are delivered in person using the established educational facilities and equipment at CEMAS.
Upon completion of the program, participants will be able to:
- Understand the operating principles and applications of SEMs.
- Perform a variety of common SEM imaging and analysis tasks.
- Improve the quality of their own SEM data collection and analysis.
- Participants who complete the program also receive a certificate of completion from CEMAS and the College of Engineering.
Program Dates

Component #1 (online or in-person): date to be announced
Component #2 (in-person): Participants choose one of two dates to attend.
- Option 1: date to be announced
- Option 2: date to be announced
Note: A minimum of four people are required to operate each two-day workshop with a maximum of twelve. All efforts will be made to accommodate preferences. Lunch and snacks will be provided for in-person attendees.
2023 program schedule
Program Component Details
Component #1:
A series of lectures/demonstration sessions delivered 100% online or in-person over three days. CEMAS will enhance the lectures with live demonstrations on the microscopes to illustrate each topic. Along with a recommended foundation of topics, a selection of elective lectures will be offered (listed below).
Accordions
- Introduction to scanning electron microscopy (SEM)
- Electron sources probe formation
- Sample Prep
- High resolution imaging
- Non-conductive sample imaging
- Energy dispersive X-Ray spectroscopy (EDS)
- Electron backscatter diffraction (EBSD)
- Data analysis
- Electron backscatter diffraction (EBSD)
- Cathodoluminescence
- In-situ/environmental SEM
- STEM in SEM
- Intro to FIB
- Semiconductor defect analysis
- Metallographic
- Data analysis
- Large area Imaging
Component #2:
A two day “hands-on” training workshop on the electron microscopes. The workshops are delivered in person using the established educational facilities and equipment at CEMAS. Along with a recommended foundation of topics, a selection of elective labs will be offered (listed below).
Accordions
- Basic imaging
- Instrument alignment
- Advanced imaging detectors or EDS
- Electron backscatter diffraction
- Cathodoluminescence
- Large area imaging
- Metallographic analysis
- Semiconductor imaging
- In-situ/environmental SEM
- STEM in SEM
- Intro to FIB
- Sample preparation
- Variable pressure SEM/non-conductive imaging
- Advanced EDS
- Ultra-high resolution imaging
- Associated elective lecture
Program Learning Objectives
After completing both the lecture and laboratory components, participants will be able to:
Accordions
- Describe the basic components of an SEM column
- Explain the differences between SEMs and other electron/x-ray imaging techniques
- Recognize the applications for which SEMs are most suitable
- Understand the types of signals generated within SEM chambers
- Relate the importance of proper preparation for different types of SEM samples
- Define and describe all relevant imaging terminology (resolution, pixel size, field width, etc)
- Relate the differences between information contained in images formed by various types of signals and detectors
- Understand how different microscope and acquisition settings affect image quality
- Demonstrate how to acquire different types of images
- Explain how different material types require different imaging strategies
- Understand the process of EDS data collection and analysis
- Describe the advantages and disadvantages between spot, line, and map collection schemes, and explain when each type is most appropriate
- Relate the importance of proper sample preparation for EDS analysis
- Explain the factors limiting accuracy and resolution of EDS results, especially quantification
- Demonstrate how to identify different elements present in a material
- Explain the different types of information obtainable through EBSD
- Relate the importance of proper sample preparation for EBSD analysis
- Explain the origins of Kikuchi patterns and the process of indexing them
- Describe the different types of ‘resolution’ in the context of EBSD
- Demonstrate the process of EBSD data acquisition and analysis
- Describe immersion lenses and explain their effects
- Define energy thresholding and demonstrate how to use it
- Define stage biasing and demonstrate how to use it
- Describe the benefits and limitations of variable pressure SEM operation
- Explain STEM imaging in SEMs, including its benefits/limitations
- Explain the TKD analysis process and its benefits/limitations
- Describe cathodoluminescence and what information it provides
Prerequisites
The workshop has open admission. While prior hands-on experience with SEMs and/or current employment in the field of SEM characterization will be beneficial, it is not a prerequisite. Experience with laboratory instrumentation such as spectrometers, vacuum systems or other imaging tools will be beneficial.
Health and Safety Protocols
All participants will be required to abide by the university's safe and healthy protocols. Contact the program administration for more information or if you have questions.
A special thanks to our course sponsors

COURSE REGISTRATION
Registration is closed.
Points of Pride
PRICING
Course Fee:
To be announced.
Cancellations and Refunds
A full refund, minus a $75 administrative fee, will be made if cancellation is received three weeks prior to the start of the course.
No refunds will be issued within three weeks of the course start date.
CONTACT
About the Center for Electron Microscopy Analysis
CEMAS is the preeminent materials characterization hub for business and academia. There are over 300 active users and $130 million dollars used for research per year. For more about CEMAS, click here.
“There's no better place on planet Earth to do microscopy than right here at CEMAS".
Don Kania, Former CEO of FEI Company
If you have questions regarding this course, please contact:
Professional & Distance Education Programs
Email: eng-profed@osu.edu
Call: 614-247-9581